TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and microsystems : design and manufacture
SN  - 9780070487093
CY  - New Delhi
KW  - Microelectronics  Microelectromechanical systems (MEMS)
KW  - Microsystem
KW  - Scaling laws  Miniaturisation
N1  - Includes bibliographical references and index
ER  -