Hsu, Tai-Ran <br/><br/>
MEMS and microsystems : design and manufacture 

 - New Delhi  Tata McGraw-Hill  2002 
 - xii, 436p.   
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics  Microelectromechanical systems (MEMS)<br/>Microsystem<br/>Scaling laws  Miniaturisation