Rai-Choudhury, P, ed.
MEMS and MOEMS technology and applications
- New Delhi PHI Learning 2000
- xi, 520p.
Includes index
9788120337527
MEMS technology
MEMS/MOEMS devices -- Operation and Design
Micro-Electromechanical systems
Micro-Optoelectromechanical systems(MOEMS)
MOEMS technology
Optical communications networks Silicon micromachines
Optical microsystem Modeling and Simulation