TY  - BOOK
AU  - Rai-Choudhury, P, ed.
TI  - MEMS and MOEMS technology and applications
SN  - 9788120337527
CY  - New Delhi
KW  - MEMS technology
KW  - MEMS/MOEMS devices -- Operation and Design
KW  - Micro-Electromechanical systems
KW  - Micro-Optoelectromechanical systems(MOEMS)
KW  - MOEMS technology
KW  - Optical communications networks  Silicon micromachines
KW  - Optical microsystem  Modeling and Simulation
N1  - Includes index
ER  -