TY  - BOOK
AU  - Gianchandani, Yogesh B, ed.
AU  - Tabata, Osamu, ed.
AU  - Zappe, Hans, ed.
TI  - Comprehensive microsystems - vol.3 : optical systems industrial applications emerging topics
SN  - 9780444521941
PB  - Elsevier
KW  - MEMS
KW  - Microelectromechanical systems
N1  - Includes index
ER  -