Armstrong, G A <br/><br/>
TCAD for Si, SiGe and GaAs integrated circuits 

 -  2007  The Institution of Engineering and Technology  London 
 - xi, 443p  
 - IET circuits, devices and systems series .
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780863417436 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits  TCAD<br/>SiGe/SiGeC films  Diffusion and oxidation