Motamedi, Manouchehr E, ed. <br/><br/>
MOEMS : micro-opto-electro-mechanical systems 

 -  New Age International  New Delhi  2010 
 - xxi, 614p  
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9788122428339 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Fiber optic systems<br/>MEMS and MOEMS CAD<br/>Micro-optics<br/>Micro-opto-electro-mechanical systems<br/>Microfabrication<br/>MOEMS