TY  - BOOK
AU  - Motamedi, Manouchehr E, ed.
TI  - MOEMS : micro-opto-electro-mechanical systems
SN  - 9788122428339
PB  - New Age International
KW  - Fiber optic systems
KW  - MEMS and MOEMS CAD
KW  - Micro-optics
KW  - Micro-opto-electro-mechanical systems
KW  - Microfabrication
KW  - MOEMS
N1  - Includes index
ER  -