Mathia, Karl <br/><br/>
Robotics for electronics manufacturing : principles and applications in cleanroom automation 

 -  Cambridge  Cambridge University Press  2010 
 - xii, 238p.   
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780521187343 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Atmospheric robots  Design<br/>Cleanroom robotics<br/>Electronics manufacturing<br/>Industrial robotics<br/>Robotics<br/>Vacuum robits  Design