Chiang, Charles C <br/><br/>
Design for manufacturability and yield for nano-scale CMOS 

 -  New Delhi  Springer  2007 
 - xxvii, 254p.   
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9788184892444 
<br/><br/><label>Subjects--Topical Terms: </label><br/>CMOS<br/>Design for manufacturability(DFM) and yield(DFY) -- Nano-Scale CMOS<br/>DFMDFY  IC Manufacturing<br/>Nanoscale CMOS<br/>Systematic yield  CMP