TY  - BOOK
AU  - Chiang, Charles C
AU  - Kawa, Jamil
TI  - Design for manufacturability and yield for nano-scale CMOS
SN  - 9788184892444
PB  - New Delhi
KW  - CMOS
KW  - Design for manufacturability(DFM) and yield(DFY) -- Nano-Scale CMOS
KW  - DFMDFY  IC Manufacturing
KW  - Nanoscale CMOS
KW  - Systematic yield  CMP
N1  - Includes bibliographical references and index
ER  -