Ananthasuresh, G K <br/><br/>
Micro and smart systems 

 -  New Delhi  Wiley India  2010 
 - xxvii, 392p.   
<br/><br/><label>ISBN: </label>9788126527151 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic circuits and control  Micro and smart systems<br/>MEMS<br/>Micro and smart systems<br/>Micro sensors<br/>Micromachining technology<br/>Microsystems<br/>Smart systems