Plummer, James D. <br/><br/>
Silicon VLSI technology : fundamentals, practice and modeling 

 - New Delhi  Pearson  2009 
 - xiv, 817p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9788131726044 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Back-end technology<br/>CMOS technology<br/>Dopant diffusion<br/>Lithography<br/>Semiconductor manufacturing<br/>Silicon VLSI Technology<br/>Thin film deposition