TY  - BOOK
AU  - Plummer, James D.
AU  - Deal, Michael D
AU  - Griffin, Peter B
TI  - Silicon VLSI technology : fundamentals, practice and modeling
SN  - 9788131726044
CY  - New Delhi
KW  - Back-end technology
KW  - CMOS technology
KW  - Dopant diffusion
KW  - Lithography
KW  - Semiconductor manufacturing
KW  - Silicon VLSI Technology
KW  - Thin film deposition
N1  - Includes bibliographical references and index
ER  -