Meng, Ellis <br/><br/>
Biomedical microsystems 

 -  Boca Raton  CRC Press 
 - xxxvii, 394p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781420051223 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Biomedical<br/>BioMEMS materials<br/>Microfabrication methods<br/>Microsystems<br/>Sensing and detection methods