Gardner, Julian W <br/><br/>
Micorsensors, MEMS and smart devices 

 - New Delhi  John Wiley & Sons  2001 
 - xxvii, 1551p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9788126540822 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic materials and processing<br/>MEMS and smart devices<br/>Microelectronic technologies<br/>Microsensors<br/>Silicon micromachining<br/>Smart sensors and MEMS