TY  - BOOK
AU  - Gardner, Julian W
AU  - Awadelkarim, Osama O
AU  - Varadan, Vijay K
TI  - Micorsensors, MEMS and smart devices
SN  - 9788126540822
CY  - New Delhi
KW  - Electronic materials and processing
KW  - MEMS and smart devices
KW  - Microelectronic technologies
KW  - Microsensors
KW  - Silicon micromachining
KW  - Smart sensors and MEMS
N1  - Includes bibliographical references and index
ER  -