Gardner, Julian W <br/><br/>
Microsensors, MEMS, and smart devices   

 - New Delhi  Wiley India  2012 
 - xxi, 883p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9788126540822 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic materials and processing<br/>MEMS and smart devices<br/>Microelectronic technologies<br/>Microsensors<br/>Silicon micromachining<br/>Smart sensors and MEMS