Brodie, Ivor <br/><br/>
The physics of micro/nano-fabrication 

 - New York  Plenum Press  1992 
 - xix, 771p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9788184894134 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micro/nano-fabrication<br/>Microelectronics<br/>Microfabrication<br/>Nanofabrication<br/>Thin-film circuits