TY  - BOOK
AU  - McGeough, Joseph, ed.
TI  - Micromachining of engineering materials
SN  - 9780824706449
CY  - New York
KW  - Diamond micromachining
KW  - Ion beam machining
KW  - Laser micromachining
KW  - Measurement techniques  Micromachining
KW  - Micromachining -- Engineering materials
KW  - Ultrasonic micromachining
N1  - Includes bibliographical references and index
ER  -