Kaajakari, Ville <br/><br/>
Practical MEMS 

 - Las Vegas  Small Gear Publishing  2009 
 - xvi, 478p.   
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780982299104 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Accelerometers<br/>Actuators<br/>Gyroscopes<br/>Integrated circuits<br/>MEMS<br/>Microelectromechanical systems<br/>Microfluidics<br/>RF MEMS<br/>Transducers