Allen, James J <br/><br/>
Micro electro mechanical system design 

 - Baca Raton  Taylor and Francis  2005 
 - 465p.   
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780824758240 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical mechanical polishing<br/>Electromechanics<br/>Engineering design<br/>Mechanics -- Micrelectro mechanics<br/>MEMS  Tools and Technics <br/>Metal polishing -- Chemical mechanical polishing<br/>Microelectromechanical systems (