TY - BOOK AU - Rita Khare TI - Micro and nano scale technologies : applications and research SN - 9789384568580 CY - New Delhi KW - Mass spectrometry KW - Micro and nanoscale technologies KW - Nanoscience KW - Nanosensor KW - Nanotechnology KW - X-Ray lithography KW - XRL and LIGA N1 - Includes bibliographical references and index ER -