TY - BOOK AU - Jones, Thomas B AU - Nenadic, Nenad G TI - Electromechanics and mems SN - 9781316609040 CY - Delhi KW - Circuit-based modeling KW - Electromechanics KW - Magnetic MEMS devices -- Electromechanics KW - MEMS KW - MEMS Technology N1 - includes index ER -