000 00652nmm a2200229Ia 4500
001 EBK410
005 20250328114534.0
008 250328s9999 xx 000 0 und d
020 _a9781461493204
100 _aAlexander A. Demkov
245 0 _aIntegration of Functional Oxides with semiconductors
250 _a2014
260 _bspringer
260 _c2014
650 _a Instrumentation
650 _aElectronics and Microelectronics
650 _aEngineering
700 _a Agham B. Posadas
856 _3Click here to access online
856 _uhttps://link.springer.com/openurl?genre=book&isbn=978-1-4614-9320-4
942 _cEBK
999 _c142415
_d142415