| 000 | 00705nmm a2200241Ia 4500 | ||
|---|---|---|---|
| 001 | EBK1516 | ||
| 005 | 20250328114600.0 | ||
| 008 | 250328s9999 xx 000 0 und d | ||
| 020 | _a9783319070049 | ||
| 100 | _aBarton C. Prorok | ||
| 245 | 0 | _a"MEMs and Nanotechnology, Volume 8" | |
| 250 | _a2015 | ||
| 260 | _bspringer | ||
| 260 | _c2015 | ||
| 490 | _aConference Proceedings of the society for Experimental Mechanics series | ||
| 650 | _aEngineering | ||
| 650 | _aMicrosystems and MEMs | ||
| 700 | _a Jennifer Hay | ||
| 700 | _a LaVern starman | ||
| 856 | _3Click here to access online | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-319-07004-9 | ||
| 942 | _cEBK | ||
| 999 |
_c143521 _d143521 |
||