| 000 | 00620nmm a2200229Ia 4500 | ||
|---|---|---|---|
| 001 | EBK5115 | ||
| 005 | 20250328121350.0 | ||
| 008 | 250328s9999 xx 000 0 und d | ||
| 020 | _a9783319671321 | ||
| 100 | _aMark J Jackson | ||
| 245 | 0 | _aMicro and Nanomanufacturing Volume II | |
| 250 | _a2018 | ||
| 260 | _bSpringer | ||
| 260 | _c2018 | ||
| 650 | _aEngineering | ||
| 650 | _aMicrosystems and MEMS | ||
| 700 | _a Janusz Kacprzyk | ||
| 700 | _a Oscar Castillo | ||
| 856 | _3Click here to access online | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-319-67132-1 | ||
| 942 | _cEBK | ||
| 999 |
_c147120 _d147120 |
||