000 00686nmm a2200241Ia 4500
001 EBK6901
005 20250328123646.0
008 250328s9999 xx 000 0 und d
020 _a9783030214968
100 _aPaolo Di Barba
245 0 _aMEMS: Field Models and Optimal Design
250 _a2020
260 _bspringer
260 _c2020
490 _aLecture Notes in Electrical Engineering
650 _a Instrumentation
650 _aElectronics and Microelectronics
650 _aEngineering
700 _a Slawomir Wiak
856 _3Click here to access online
856 _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-030-21496-8
942 _cEBK
999 _c148906
_d148906