| 000 | 00662nmm a2200241Ia 4500 | ||
|---|---|---|---|
| 001 | EBK8367 | ||
| 005 | 20250328123719.0 | ||
| 008 | 250328s9999 xx 000 0 und d | ||
| 020 | _a9783030617097 | ||
| 100 | _aAlissa M Fitzgerald | ||
| 245 | 0 | _aMEMS Product Development | |
| 250 | _a2021 | ||
| 260 | _bspringer | ||
| 260 | _c2021 | ||
| 490 | _aMicrosystems and Nanosystems | ||
| 650 | _aEngineering | ||
| 650 | _aMicrosystems and MEMS | ||
| 700 | _a Carolyn D White | ||
| 700 | _a Charles C Chung | ||
| 856 | _3Click here to access online | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-030-61709-7 | ||
| 942 | _cEBK | ||
| 999 |
_c150372 _d150372 |
||