| 000 | 00559nmm a2200205Ia 4500 | ||
|---|---|---|---|
| 001 | EBK8952 | ||
| 005 | 20250328123733.0 | ||
| 008 | 250328s9999 xx 000 0 und d | ||
| 020 | _a9783030797492 | ||
| 100 | _aZhuoqing Yang | ||
| 245 | 0 | _aAdvanced MEMS/NEMS Fabrication and Sensors | |
| 250 | _a2022 | ||
| 260 | _bspringer | ||
| 260 | _c2022 | ||
| 650 | _aEngineering | ||
| 650 | _aMicrosystems and MEMS | ||
| 856 | _3Click here to access online | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-030-79749-2 | ||
| 942 | _cEBK | ||
| 999 |
_c150957 _d150957 |
||