| 000 | 00663nmm a2200241Ia 4500 | ||
|---|---|---|---|
| 001 | EBK9492 | ||
| 005 | 20250328143848.0 | ||
| 008 | 250328s9999 xx 000 0 und d | ||
| 020 | _a9783030801359 | ||
| 100 | _aBenedetto Vigna | ||
| 245 | 0 | _aSilicon Sensors and Actuators | |
| 250 | _a2022 | ||
| 260 | _bSpringer | ||
| 260 | _c2022 | ||
| 650 | _a Instrumentation | ||
| 650 | _aElectronics and Microelectronics | ||
| 650 | _aEngineering | ||
| 700 | _a Flavio Francesco Villa | ||
| 700 | _a Paolo Ferrari | ||
| 856 | _3Click here to access online | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-030-80135-9 | ||
| 942 | _cEBK | ||
| 999 |
_c157497 _d157497 |
||