| 000 | 00735nmm a2200253Ia 4500 | ||
|---|---|---|---|
| 001 | EBK10984 | ||
| 005 | 20250328143921.0 | ||
| 008 | 250328s9999 xx 000 0 und d | ||
| 020 | _a9789819928361 | ||
| 100 | _aYangyuan Wang | ||
| 245 | 0 | _aHB of Integrated Circuit Industry | |
| 250 | _a1st ed. 2024 | ||
| 260 | _bSpringer | ||
| 260 | _c2024 | ||
| 490 | _aAdvances in Sustainability Science and Technology | ||
| 650 | _a Instrumentation | ||
| 650 | _aElectronics and Microelectronics | ||
| 650 | _aEngineering | ||
| 700 | _a Jesse Jen-Chung Lou | ||
| 700 | _a Min-Hwa Chi | ||
| 856 | _3Click here to access online | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-981-99-2836-1 | ||
| 942 | _cEBK | ||
| 999 |
_c158989 _d158989 |
||