000 00659nmm a2200229Ia 4500
001 EBK11727
005 20250328143937.0
008 250328s9999 xx 000 0 und d
020 _a9783031592195
100 _aBadih El-Kareh
245 0 _aSilicon Components and Processes Self Study
250 _a2024
260 _bSpringer
260 _c2024
490 _aLecture Notes in Mechanical Engineering
650 _aElectronic Circuits and Systems
650 _aEngineering
700 _a Lou N. Hutter
856 _3Click here to access online
856 _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-031-59219-5
942 _cEBK
999 _c159732
_d159732