000			00530nam a2200193Ia 4500
001			14090
005			20250221150739.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a195105087
100			_aCampbell, Stephen A
245		4	_aThe science and engineering of microelectronic fabrication
260			_aNew York
260			_bOxford University Press
260			_c1996
300			_axv, 536p.
500			_aIncludes index
650			_aMicroelectronics--Semiconductors--Design and Construction
942			_cBK
999			_c30138 _d30138