000			00750nam a2200301Ia 4500
001			22204
005			20250221151719.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a9971-51-395-1
100			_aSze, S M
245		0	_aSemiconductor devices : physics and technology
250			_a2
260			_aSingapore
260			_bJohn Wiley
260			_c2002
300			_aviii, 564p: ill.
500			_aIncludes bibliographical references and index
650			_aBipolar transistor
650			_aCMOS
650			_aEtching
650			_aIntegrated devices
650			_aLithography
650			_aMicrowave diodes
650			_aMOSFET
650			_aPhotonic devices
650			_aSemiconductor devices
942			_cBK
999			_c38165 _d38165