| 000 | 00719nam a2200265Ia 4500 | ||
|---|---|---|---|
| 001 | 24193 | ||
| 005 | 20250221152316.0 | ||
| 008 | 250214s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a3540675825 | ||
| 100 | _aElwenspoek, M | ||
| 245 | 0 | _aMechanical microsensors | |
| 260 | _aNew York | ||
| 260 | _bSpringer Verlag | ||
| 260 | _c2001 | ||
| 300 | _ax, 2695p. | ||
| 490 | _aMicrotechnology and MEMS | ||
| 500 | _aIncludes bibliographical references and index. | ||
| 650 | _aDetectors -- Design and construction | ||
| 650 | _aMicroelectromechanical systems -- Design and construction | ||
| 650 | _aMicromachining | ||
| 650 | _aSilicon | ||
| 650 | _aTransducers | ||
| 700 | _aWiegerink, R | ||
| 942 | _cBK | ||
| 999 |
_c40122 _d40122 |
||