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001			24803
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020			_a849300770
100			_aGad-el-Hak, Mohamed, Ed.
245		4	_aThe MEMS handbook
260			_aBoca Raton
260			_bCRC Press
260			_c2002
300			_aill.
490			_aThe Mechanical engineering handbook series
500			_aIncludes bibliographical references and index
650			_aMechanical engineering -- Handbook
650			_aMicroelectromechanical systems
942			_cBK
999			_c40729 _d40729