000			00709nam a2200229Ia 4500
001			25204
005			20250221152337.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a201444941
100			_aJaeger, Richard C
245		0	_aIntroduction to microelectronic fabrication - Vol. 5
250			_a2
260			_aNew Jersey
260			_bPrentice-Hall
260			_c2002
300			_axiv, 316p.
490			_aModular series on solid state devices
500			_aIncludes bibliographical references and index
650			_aMEMS -- Microelectronic mechanical systems
650			_aMicroelectronics -- MOS and CMOS (Metal oxide semiconductor, Complimentary) -- Fabrication
942			_cBK
999			_c41120 _d41120