000			00544nam a2200217Ia 4500
001			25908
005			20250221152351.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a0-07-048709-x
100			_aHsu, Tai-Ran
245		0	_aMEMS and microsystems : design and manufacture
260			_aNew Delhi
260			_bTata McGraw-Hill
260			_c2002
300			_axii, 436p:
500			_aIncludes index
650			_aMicroelectromechanical systems
650			_aMicroelectronics
650			_aMicrosystems
942			_cBK
999			_c41752 _d41752