| 000 | 00635nmm a2200205Ia 4500 | ||
|---|---|---|---|
| 001 | EBK36030 | ||
| 005 | 20260107144717.0 | ||
| 008 | 260107s9999||||xx |||||||||||||||||und|| | ||
| 020 | _a9789819516063 | ||
| 100 | _aKaiying Wang | ||
| 245 | 0 | _aPhotoresist Technology in Microsystems: Principles, Processes and Applications | |
| 250 | _a2025 | ||
| 260 | _bSpringer Nature Singapore | ||
| 260 | _c2025 | ||
| 490 | _aSpringer Series in Advanced Microelectronics | ||
| 650 | _aEngineering | ||
| 856 | _3Click here to access online | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-981-95-1606-3 | ||
| 942 | _cEBK | ||
| 999 |
_c456264 _d456264 |
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