| 000 | 00625nmm a2200205Ia 4500 | ||
|---|---|---|---|
| 001 | EBK37725 | ||
| 005 | 20260109121206.0 | ||
| 008 | 260109s9999||||xx |||||||||||||||||und|| | ||
| 020 | _a9789819661626 | ||
| 100 | _aKamaljeet Singh | ||
| 245 | 0 | _aMicro Electro Mechanical System (MEMS) Technology for Multifaceted Applications | |
| 250 | _a2025 | ||
| 260 | _bSpringer Nature Singapore | ||
| 260 | _c2025 | ||
| 650 |
_aMechanical Engineering _9149 |
||
| 700 | _aAyan Karmakar | ||
| 856 | _3Click here to access online | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-981-96-6162-6 | ||
| 942 | _cEBK | ||
| 999 |
_c463966 _d463966 |
||