000			00781nam a2200265Ia 4500
001			32056
005			20250221153136.0
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020			_a0-8247-5824-2
100			_aAllen, James, J
245		0	_aMicro electro mechanical system design
260			_aNew York
260			_bTaylor and Francis
260			_c2005
300			_a465p.
500			_aIncludes bibliographical references and index
650			_aChemical mechanical polishing
650			_aElectromechanics
650			_aEngineering design
650			_aMechanics -- Micrelectro mechanics
650			_aMEMS) -- Tools and Technics
650			_aMetal polishing -- Chemical mechanical polishing
650			_aMicroelectromechanical systems (
942			_cBK
999			_c47877 _d47877