000			00560nam a2200217Ia 4500
001			32059
005			20250221153136.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a0-07-144559-5
100			_aGeng, Hwaiyu, Ed.
245		0	_aSemiconductor manufacturing handbook
260			_aNew York
260			_bMcGraw-Hill
260			_c2005
300			_aill.
500			_aIncludes index.
650			_aMicroelectromechanical Systems (MEMS)
650			_aNanotechnology
650			_aSemiconductor manufacturing -- Handbook
942			_cBK
999			_c47880 _d47880