000			00817nam a2200289Ia 4500
001			33504
005			20250221153209.0
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020			_a81-312-0279-8
100			_aOhring, Milton
245		0	_aMaterials science of thin films : deposition and structure
250			_a2
260			_aNew Delhi
260			_bElsevier
260			_c2002
300			_axxi, 794p: ill.
500			_aReprint year 2006. Includes bibliographical references and index.
650			_aEpitaxy
650			_aFilm structure
650			_aMaterials science -- Thin films
650			_aPhysics
650			_aThin film nucleation
650			_aThin films -- Deposition and structure
650			_aThin films -- Mechanical properties
650			_aVacuum science
942			_cBK
999			_c49320 _d49320