| 000 | 00810nam a2200289Ia 4500 | ||
|---|---|---|---|
| 001 | 33539 | ||
| 005 | 20250221153209.0 | ||
| 008 | 250214s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a0-470-85106-6 | ||
| 100 | _aFranssila, Sami | ||
| 245 | 0 | _aIntroduction to microfabrication | |
| 260 | _aNew York | ||
| 260 | _bJohn Wiley | ||
| 260 | _c2004 | ||
| 300 | _axvii, 401p. | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aElectronic apparatus and Appliances | ||
| 650 | _aElectronic materials -- | ||
| 650 | _aEtching -- Electrochemical etching | ||
| 650 | _aMEMS) | ||
| 650 | _aMetrology -- Micrometrology | ||
| 650 | _aMicroelectromechanical systems ( | ||
| 650 | _aMicrofabrication | ||
| 650 | _aSilicon meterials | ||
| 650 | _aThinfilm materials | ||
| 942 | _cBK | ||
| 999 |
_c49355 _d49355 |
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