000			00756nam a2200229Ia 4500
001			37048
005			20250221153937.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a8179925374
100			_aMcGuire, Gary E, Ed.
245		0	_aSemiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)
260			_aMumbai
260			_bJaico
260			_c2007
300			_axiii, 675p. ;
500			_aIncludes bibliographical references and index.
650			_aProcess technology -- Handbook
650			_aSemiconductor materials -- Handbook
650			_aUltra large scale integration (ULSI)
650			_aVery large scale integration(VLSI)
942			_cBK
999			_c52847 _d52847