000			00705nam a2200241Ia 4500
001			37498
005			20250221153948.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a824726375
100			_aOsiander, Robert, Ed.
245		0	_aMEMS and microstructures in aerospace applications
260			_aBoca Raton
260			_bCRC Press
260			_c2006
300			_a388p. : ill. ;
500			_aIncludes bibliographical references and index.
650			_aAeronautical instruments
650			_aAerospace engineering - Equipment and supplies
650			_aMicroelectromechanical systems
700			_aChampion, John L, Ed.
700			_aDarrin, Ann Garrison, Ed.
942			_cBK
999			_c53297 _d53297