000			00731nam a2200265Ia 4500
001			41136
005			20250221154605.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a978818128849
100			_aLobontiu, Nicolae
245		0	_aMechanics of microelectromechanical systems
260			_aNew York
260			_bKluwer Academic
260			_c2005
300			_axi, 405p.
500			_aIncludes index
650			_aElectromagnetic transduction
650			_aMEMS) Design
650			_aMicrobridges Mems applications
650			_aMicrocantilevers
650			_aMicroelectromechanical systems (
650			_aMicrotransduction -- Actuation and Sensing
700			_aGarcia, Ephrahim
942			_cBK
999			_c56927 _d56927