000			00595nam a2200229Ia 4500
001			56288
005			20250221160151.0
008			250214s9999||||xx |||||||||||||| ||und||
020			_a9781420051223
100			_aMeng, Ellis
245		0	_aBiomedical microsystems
260			_bBoca Raton
260			_cCRC Press
300			_axxxvii, 394p.
500			_aIncludes bibliographical references and index
650			_aBiomedical
650			_aBioMEMS materials
650			_aMicrofabrication methods
650			_aMicrosystems
650			_aSensing and detection methods
942			_cBK
999			_c72058 _d72058