| 000 | 00656nam a2200253Ia 4500 | ||
|---|---|---|---|
| 001 | 58053 | ||
| 005 | 20250221160229.0 | ||
| 008 | 250214s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9788184894134 | ||
| 100 | _aBrodie, Ivor | ||
| 245 | 4 | _aThe physics of micro/nano-fabrication | |
| 260 | _aNew York | ||
| 260 | _bPlenum Press | ||
| 260 | _c1992 | ||
| 300 | _axix, 771p. | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aMicro/nano-fabrication | ||
| 650 | _aMicroelectronics | ||
| 650 | _aMicrofabrication | ||
| 650 | _aNanofabrication | ||
| 650 | _aThin-film circuits | ||
| 700 | _aMuray, Julius J | ||
| 942 | _cBK | ||
| 999 |
_c73823 _d73823 |
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